Used KLA / TENCOR 6420 Surfscan for sale

Wafer Testing And Metrology

Manufacturer

KLA / TENCOR

Model

6420 Surfscan

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Particle inspection system, 2"-8" Substrate thickness: 12 mm Single puck handling from single casset

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Non-patterned surface inspection system, 4"-8" Defect sensitivity: 0.12 micron at 95% capture Haze s

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Non-patterned wafer film surface analyzer, 6" Automatic wafer handler Defect map and Histogram 2D Si

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Defect inspection system, 6" Upgraded from 6220.

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Non-patterned surface inspection system, 4"-8" Defect sensitivity: 0.12 microns Haze sensitivity: 0.