Used KLA / TENCOR 6420 Surfscan #293758831 for sale

ID: 293758831
Wafer Size: 4"-8"
Vintage: 1996
Non-patterned surface inspection system, 4"-8" Defect sensitivity: 0.12 micron at 95% capture Haze sensitivity: 0.02 PPM Wavelength: 488 nm Argon laser: 30 mw PC Board Blue laser Spot size: 90 µm Scan frequency: 170 Hz Scan pitch: 10, 20, 40 µm Throughput: 120/6" WPH Single puck handling from single cassette or platform XY Coordinates CD ROM Writer CIM: GEM / SECS Operating system: Windows 98 1996 vintage.
KLA / TENCOR 6420 Wafer Testing and Metrology Equipment is a fully automated tool that automates the task of optimizing and testing integrated circuits (ICs) on silicon wafers. KLA 6420 provides a fast, accurate and reliable way to test large volumes of chips quickly and accurately. TENCOR 6420 systems uses advanced optical and computational systems to measure small changes of size, shape and orientation of test chips on large wafers. It is designed to be versatile in its applications, allowing for metrology and testing of a variety of wafer types. The system offers fast, precise, and versatile wafer purchasing for accurate and efficient assessment of chips - with fast throughput and turn-around times. The unit consists of three main components, the optical head, the stage, and the controller. The optical head contains various optical components such as cameras, lenses and light emitting diodes (LEDs) that are used for imaging. With the help of these components, the machine accurately measures specific features of test chips such as size, shape, and orientation. The stage is another important component which is responsible for the accurate and precise positioning of the test chip on the wafer. It consists of an array of precision guideways and actuators that accurately and rapidly move the wafer in the x, y and z-axis. The controller is the brains behind the tool. It controls the movement of the stage, the optical head and the data acquisition software. It contains powerful software that is intelligent and efficient, allowing for quick and accurate measurement of a vast number of test chips. 6420 tool also offers a variety of software packages that are specifically tailored towards specific applications. These packages are designed to improve the accuracy and throughput of the overall testing process. The software packages also allow for data analysis, statistical process control and a variety of other features that allow users to optimize their testing process. KLA / TENCOR 6420 Wafer Testing and Metrology Asset provides a fast, accurate and reliable way to test large volumes of chips quickly and accurately. It is an essential tool for semiconductor and electronics manufacturers that require high quality chips in order to produce their products. By automating the testing process, companies can increase the throughput of their operations, reduce the cost of tests and ensure high quality end products.
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