Used KLA / TENCOR 6420 Surfscan #293754476 for sale
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ID: 293754476
Wafer Size: 6"
Non-patterned wafer film surface analyzer, 6"
Automatic wafer handler
Defect map and Histogram
2D Signal integration
Non-contaminating robotic handler
Power supply: 208 V / 1 Phase / 16 A.
KLA / TENCOR 6420 is an advanced wafer testing and metrology equipment designed for efficient nanometer-scale defect analysis, characterization, and repair. It features an integrated suite of advanced hardware and software technologies to accurately identify, localize, and isolate defect particles in wafers up to 200 mm. The system is comprised of multiple subsystems, typically including a host machine, data acquisition hardware and software, vision systems, and defect analysis and repair software. The host machine can be any Pentium-class PC, with a minimum 512 MB of RAM. The data acquisition hardware and software captures test results and provides advanced defect sizing, analysis, and isolation functions. The vision unit automatically captures photographic images of each wafer to provide precise detail of any detected defects. The defect analysis and repair software employs a wide range of metrology techniques to automatically detect, size, localize, and isolate defects on the wafer. The reliability and accuracy of KLA 6420 machine is ensured by advanced optical mechanisms, which include automated focus and non-contact inspection to adjust the optics for precise alignment and particle sizing. In addition, the tool's optics are equipped with two digital autofocus cameras for creating three-dimensional images of the wafer. The defect analysis and repair functions on TENCOR 6420 asset takes in-situ images of wafers on the platform and automatically carries out defect isolation, analysis, and characterization operations. The model also includes advanced computational algorithms to ensure accurate defect identification, localization, and isolation. 6420 equipment also includes a comprehensive suite of utilities, such as a recipe management system, defect tracking unit, defect classification and quantitative analysis capabilities, comprehensive statistical analysis, and file archival functionality. Additionally, the machine features an advanced job management tool for remote management of the test operations. Overall, KLA / TENCOR 6420 is a powerful and reliable wafer testing and metrology asset designed for high precision and accuracy. Its integrated suite of hardware and software technologies, combined with advanced optics, vision systems, and defect analysis and repair functions make the model ideal for effective and efficient nanometer-scale defect analysis and characterization.
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