Used TEL / TOKYO ELECTRON Clean Track Mark 7 #293638993 for sale
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ID: 293638993
Wafer Size: 8"
Vintage: 1995
Baking system, 8"
Wafer flow: Right to left
Silicon wafer
Process-1:
FC-9801 F NEC Controller
Stage / Indexer: Open CSB / Cassette stage block
Cassette Block Robotics Arm (CRA)
Process-2:
Process Block Robotics Arm (PRA)
(6) DHP
(9) LHP
(5) CPL
Power transformer
SHINWA Temperature and Humidity Controller (THC)
UPS
Hard Disk Drive (HDD) included
(2) Missing parts:
Main arm Y-motor
Main arm Z-motor driver
1995 vintage.
TEL TEL / TOKYO ELECTRON Clean Track Mark 7 is a photoresist system designed to provide superior imaging quality, productivity and best-in-class process control for a wide range of applications. The system is a combination of a development/coating module, an imaging module and a contact stepper with aligner. The development/coating module is designed to provide superior capabilities for developing and coating processes. It utilizes advanced bubble-free technology to ensure the highest quality. The module also features a film front and thickness adjustment control to ensure proper film thickness. Additionally, the module features speed adjustment to ensure repeatability and uniformity of the processes. The imaging module features advanced laser interferometric scanning capabilities, as well as a full-sized scanning surface to ensure maximum resolution of the image. Additionally, the imaging module can be used for both precision and mass production runs. It also features a manual image setter for one-off images. The contact stepper with aligner is designed to provide accurate positioning of the mask for consistent registration of the image. The stepper also features an advanced pattern recognition control to precisely control the registration between the masking material and the surface. Additionally, the contact stepper enables extremely accurate contact alignment so that the image is perfectly aligned to the substrate. TEL Clean Track Mark 7 is a state-of-the-art photoresist system that is capable of delivering superior imaging quality, productivity and best-in-class process control. Its advanced features ensure consistency and quality control in a variety of processes. Additionally, its compact size and energy efficient design ensure that it can easily fit into small spaces. TOKYO ELECTRON Clean Track Mark 7 provides the ideal solution for a wide range of imaging applications.
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