Used TEL / TOKYO ELECTRON Clean Track Mark 7 #293746058 for sale
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ID: 293746058
Wafer Size: 8"
(2) Coater / (2) Developer system, 8"
Wafer flow: Right to left
Single block.
TEL / TOKYO ELECTRON Clean Track Mark 7 is a photoresist equipment developed by TEL Ltd. The system is designed to be used by machine operators for precision processing and repair of high-density integrated circuits (HDICs) and high-aspect ratio (HAR) devices. This advanced photoresist unit is designed to reduce substrate damage and offers a lithography-like accuracy when used for sensitive device modification. The machine consists of a deposition station, a pattern engineering station, and an evaluation station. The deposition station allows for the deposition of photoresist materials on the substrate with a high degree of accuracy. The pattern engineering station allows for the creation of high-accuracy patterns on the substrate, while the evaluation station allows for the assessment of the as-deposited patterns. TEL Clean Track Mark 7 photoresist tool uses a patented coating process, which includes a unique pre-treatment stage. During this stage, the substrate is treated with an oxygen-based plasma to remove contaminants and oxidation layers, which can reduce the quality of deposited photoresists. The pre-treatment stage also ensures the efficient adhesion of the photoresist to the substrate. The photoresist asset also features a high-quality imaging model, which includes a digital image sensor, a high-precision optical lens, and a proprietary image-processing algorithm. This equipment uses cutting-edge technology to provide higher resolution of the imaging process, allowing for the accurate control of the pattern formation. TOKYO ELECTRON Clean Track Mark 7 photoresist system also features automated pattern-correction technologies, allowing for the adjustment of the size, shape, and/or orientation of the resist patterns. This feature allows for the production of very precise patterns that can achieve tight tolerances and high yields. Additionally, this photoresist unit is equipped with a particle removal machine, which helps to reduce particle contamination in the photoresist. This tool helps the photoresist asset to remain clean and allows for the formation of high-accuracy resist patterns. In summary, Clean Track Mark 7 photoresist model is an advanced solution for the processing and repair of HDICs and HAR devices. The patented coating process and automated pattern-correction technologies allow for the formation of accurate and precise resist patterns, while the imaging equipment and particle removal system help ensure cleanliness and accuracy.
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