Used TEL / TOKYO ELECTRON Clean Track Mark 7 #293746062 for sale
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ID: 293746062
Wafer Size: 8"
(3) Developer systems, 8"
Wafer flow: Right to left
Single block.
TEL / TOKYO ELECTRON Clean Track Mark 7 is a model of photoresist equipment developed by TEL Limited. It is a fully automated production tool set for photomask processing, which consists of an exposure unit (FUJI EL-CT7), a developing unit (FUJI Dv2-CT7) and a coating unit (FUJI Alt-CT7). It is designed to produce photomasks with high precision and repeatability and is suitable for clean room applications. The FUJI EL-CT7 exposure unit is equipped with a state-of-the-art laser diode array for high resolution imaging, and it integrates and adjusts the digital measurement and adjustment functions to ensure a high-precision exposure of photomasks with highly reliable performance. It is further equipped with a dual nozzle sprayer and variable temperature control system to guarantee a uniform photoresist coating. The FUJI Dv2-CT7 developing unit is responsible for the development process and is equipped with a selectively variable stirring unit and special nozzle shapes, to enable it to provide a controlled and uniform developing process. It is further able to perform a comprehensive inspection of the photomask and it can be used with a variety of different types of photoresist. Moreover, the FUJI Alt-CT7 coating unit offers an advanced multi-layer pre-coat and post-coat techniques with a wide range of resist combinations. Apart from its technically advanced components, TEL Clean Track Mark 7 also provides excellent safety features for clean room applications. It has an automated safety control machine with a variety of sensors to detect any potential hazards, such as temperature changes and gas concentrations. Additionally, it is also equipped with integrated safety switches and alarm systems to protect personnel from any potential hazards during operation. In conclusion, TOKYO ELECTRON Clean Track Mark 7 is a highly advanced and automated photoresist tool designed with the highest level of safety and production technologies. Its high resolution imaging, advanced pre-coat and post-coat techniques and automated safety control asset make it a perfect tool for clean room applications.
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