Used TEL / TOKYO ELECTRON Clean Track Mark 7 #293746066 for sale
URL successfully copied!
ID: 293746066
Wafer Size: 8"
(1) Coater / (2) Developer system, 8"
Wafer flow: Right to left
Single block.
TEL / TOKYO ELECTRON Clean Track Mark 7 is a photoresist equipment which enables manufacturers of integrated circuits (ICs) to achieve fine and accurate processing of intricate structures. The system is capable of producing highly accurate and reliable tinned-oxide structures without the need for pre-patterning masking. TEL Clean Track Mark 7 utilizes a unique patented Optra Beam profile technology to accurately adjust the beam shape and power density to match the substrate and photoresist profile in order to achieve desired processing objectives. The machine allows real-time monitoring and adjustment of beam shape and power density, allowing highly accurate and effective processing even with complex shapes and features. TOKYO ELECTRON Clean Track Mark 7 also employs state-of-the-art imaging and laser control techniques, as well as an improved irradiation unit that eliminates shadow and flare effects. By precisely controlling the laser spot size and power density, the machine reduces film overlapping and thus improves the accuracy of the final results. The photoresist layer that is used in conjunction with Clean Track Mark 7 is designed to be thermally stable and have very low electrical resistance. This enables the tool to produce extremely thin (1-2 microns wide) structures with high aspect ratio, as well as very fine line widths and narrow aluminum interconnects. The asset also allows the process window to be adjusted continuously, allowing the customer to define exacting processing and performance criteria such as image resolution and critical feature height. Furthermore, step and repeat algorithms can be enabled and utilized to replicate ICs over multiple substrates with high accuracy. TEL / TOKYO ELECTRON Clean Track Mark 7 is a powerful and reliable photoresist model ideal for applications that require precision and accuracy, such as for IC manufacturing. Its advanced optics, imaging and laser control technologies enable highly accurate, yet flexible, processing that ensures perfect results even in complex substrates.
There are no reviews yet