Used TEL / TOKYO ELECTRON Clean Track Mark 7 #293768004 for sale

TEL / TOKYO ELECTRON Clean Track Mark 7 is a photoresist equipment that enables the processing of a variety of photoresists (including liquids, gels, and paste) more efficiently, with higher uniformity and superior cleanliness. It effectively meets the most stringent requirements for the development of advanced photoresists. The Mark 7 operates on the principle of Optical Interference (OI), which employs the optical power of a light source to activate the photoresist, control its development, and accurately measure its critical dimensions. This high-precision Optical Interference technology makes it possible to achieve the best critical dimension uniformity, uniform bottom-anti reflective coating (BARC) thickness, and excellent process reproducibility. It also facilitates real-time photoresist monitoring and measurement. The Mark 7 has a newly-designed airbearing spindle system which ensures aspherical surface machining. Also, a cleaning unit has been incorporated for efficient cleaning of the spIndle, ensuring a clean and reliable operation. The Mark 7 features automatic-loading and unloading of the photoresists, with consistent loading and unloading force value for each resist loaded for reliable spraying of the resist material. Moreover, the Mark 7 ensures high-throughput operations, improving productivity and cost-effectiveness. The substrate robot is equipped with an ultra-fast picking head for polished substrates that offers an advanced repeatability and accuracy. The substrate stocker also provides an effective way to transfer multiple substrates simultaneously, practically eliminating the substrate transfer waiting time. The machine is designed with safety in mind, and it is equipped with advanced safety mechanisms that prevent accidents or misuse. Moreover, the Mark 7 is designed with several user-friendly techniques such as automatic tracking and real-time alarms that enable easy and accurate operation. The operator gets real-time feedback regarding the process information, which ensures faster response times to procedures and increased productivity. All these factors make TEL Clean Track Mark 7 the perfect photoresist tool for any photoresist processing requirements. Through its powerful features and high precision, it not only meets the most stringent requirements for advanced photoresists, but also offers an efficient, cost-effective process.