Used TEL / TOKYO ELECTRON Clean Track Mark 7 #293770189 for sale

TEL / TOKYO ELECTRON Clean Track Mark 7
ID: 293770189
System.
TEL / TOKYO ELECTRON Clean Track Mark 7 (also known as the CTM7) is a photoresist equipment for fabricating semiconductor devices. It is a fully automated, non-contact exposure tool designed for use in the production of a wide variety of photomasks. The CTM7 is a mid-range system designed to perform precision photolithography operations with tight tolerance levels while maintaining a high yield rate. The unit features an advanced turntable-type conveyance mechanism, which supports multiple exposures and ensures consistent substrate alignment. The turntable is connected to an advanced stepper motor to provide precise substrate handling capabilities. It also includes a vacuum chuck machine that supports the handling of fragile substrates with tight uniformity levels. The tool is capable of handling 5-inch, 6-inch, and 8-inch wafers while maintaining a yield rate of 99.99%. The exposure asset is equipped with an Ultra-High Vacuum (UHV) source chamber and optical parts. This setup allows for dual focus and scanning exposure operations, with exposure accuracy down to a few nanometers. It also offers both double exposure and laser exposure capabilities, as well as adjustable alignment for line and edge exposures. The CTM7 also features a programmable wafer positioning model, which can be used to automatically position wafers onto the exposure area. This helps ensure repeatable, high quality results with a minimum of manual input. Additionally, the CTM7 comes with a wide array of software that allows for easy operation and precise control of the exposure process. In conclusion, TEL Clean Track Mark 7 is an advanced photoresist equipment that is perfect for fabricating semiconductor devices. It features a turntable-type conveyance mechanism, a vacuum chuck system, an Ultra-High Vacuum source chamber, dual focus and scanning capabilities, laser exposure capabilities, adjustable alignment, and a programmable wafer positioning unit. It is capable of producing consistent and high quality results with a minimum of manual input.
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