Used TEL / TOKYO ELECTRON Clean Track Mark 7 #9243714 for sale

TEL / TOKYO ELECTRON Clean Track Mark 7
ID: 9243714
Wafer Size: 8"
Vintage: 1994
(2) Coater system, 8" 1994 vintage.
TEL / TOKYO ELECTRON Clean Track Mark 7 is a state-of-the-art photoresist equipment used in the photolithography process in the semiconductor industry. The system is designed to improve the accuracy and repeatability of sub-micron features in integrated circuits. Photolithography is a process by which patterns are put onto a substrate material like semiconductor wafers, LCD glass, or other materials used in the semiconductor industry. The unit utilizes a powerful projection optics and a high accuracy stage to align the exposed and unexposed parts of the substrate material. To achieve its superior accuracy and repeatability, TEL Clean Track Mark 7 machine incorporates a high-performance optical tool along with a motion control asset to control the path and inspection of the substrate material. The optical model is equipped with a broadband collimation lens that focuses light onto the coating. A high-speed, ultra precise, step-and-repeat motion control equipment consists of a 3-axis linear stage for substrate alignment and component placement, and a 6-axis articulating robot arm for scanning, inspection, and rinsing. This system allows for precise and repeatable placement of layers of photoresist material onto the substrate material. The technology also includes an automated cleaning station to remove residue, dust, and contaminants from the substrate material, and a film inspection station to confirm proper layer placement and alignment. The state-of-the-art TOKYO ELECTRON Clean Track Mark 7 unit also incorporates innovative image recognition algorithms and robotic tools for inspection and optimization of photoresist layers. The machine is capable of detecting defects and flaws as small as 2µm, and can measure line-edge-roughness and tip-to-tip distance at 5µm accuracy. Clean Track Mark 7 tool is patented by TEL and is a leading photoresist asset for implementing cutting-edge semiconductor process technology. This advanced model provides high accuracy, repeatability, and reliability for precision photolithography processes utilized by many industries such as semiconductor, display, and data storage. The equipment's precision and versatility make it an ideal solution for manufacturing small, ultra-high density electronic components.
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