Used TEL / TOKYO ELECTRON Clean Track Mark 7 #9350704 for sale

ID: 9350704
Vintage: 1996
Resist coater / Developer system 1996 vintage.
TEL / TOKYO ELECTRON Clean Track Mark 7 is a photoresist equipment specifically designed to ensure the highest level of particle-free processing for large panels, especially difficult to clean materials like polyimide and ceramics. Equipped with a dual UV Accelerator source, this system is particularly suited for improved panel cleanliness prior to deposition. TEL Clean Track Mark 7 has two arcs on the top to irradiate an ozone enriched argon atmosphere in order to maintain a clean ambient. Upon entering the chamber, panels pass along the smooth wipe edge process that utilizes a high velocity wipe to remove any particles of contamination. Then, a progressive high intensity UV source is used to clean the panel surfaces, further eliminating any potential particles. Depending on the type of substrate used, TOKYO ELECTRON Clean Track Mark 7 is able to precisely clean from as little as 0.1 to 0.3 microns depending on the customer's specific process needs. The room of Clean Track Mark 7 is filled with clean nitrogen that is continuously monitored and controlled for an optimal particle-free environment, while a suite of other sensors constantly monitor temperature, humidity, and gas levels of the chamber. Additionally, a high speed shutter is installed that opens only when panels are aligned for maximum coverage. This maximizes throughput and reduces power consumption. The operator panel of TEL / TOKYO ELECTRON Clean Track Mark 7 provides the user with a list of all the preset recipes previously stored, as well as the ability to store up to 150 new recipes. An intuitive graphic user-interface allows operators to quickly select the parameters that need to be changed and accepted. Furthermore, the unit uses a powerful self-diagnostics tool that constantly monitors the machine and limits interference and downtime. TEL Clean Track Mark 7 is also equipped with an EXECon, which is an advanced image analysis tool. This asset can actively monitor the cleaning process in order to identify particles and debris that may need to be removed, enabling the user to rapidly identify any potential problems and to address them quickly. In conclusion, TOKYO ELECTRON Clean Track Mark 7 is an ideal model for accurately and quickly cleaning large panels and other difficult to clean materials. Its highly accurate UV source, self-diagnostics tool, and EXECon ensures the highest level of particle-free processing. The intuitive user-interface enables simple operation and recipe storage, while the continuous operation of its nitogen-rich cleanroom ensures optimal panel cleanliness.
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