Used AXCELIS / FUSION Integra RS #293593049 for sale

AXCELIS / FUSION Integra RS is a rapid thermal processor (RTP) designed to support rapid thermal diffusion processes such as rapid oxidation, annealing, and drive-in. This process is increasingly popular in the semiconductor industry due to its versatile capabilities and its efficiency. FUSION Integra RS is purpose-built to enable quick and reliable parametric tweaking, improve process performance, and optimize device functionality. AXCELIS Integra RS features a mechanical design that provides maximum flexibility and process uptime. Its proprietary Rapid Thermal Ramp technology ensures uniform temperature control and performance over large wafer sizes, making it suitable for a variety of process options. The system is equipped with dual-sector radial arms and software-controlled active zones for easy, uniformed substrate temperature control. Integra RS also features advanced safety and environmental protection. Its advanced vacuum and backfill system allows for stable atmospheric processing, keeping the process environment clean. Advanced safety design features are included, including safety interlocks, audible alarms, and override buttons. AXCELIS / FUSION Integra RS provides process uniformity for both electrical and structural processes. The system supports a wide range of process temperatures and can be customized to meet specific process demands. Additionally, FUSION Integra RS comes with advanced optical and temperature Sensor technologies that can provide real-time temperature measurement and feedback, as well as post-process analysis. AXCELIS Integra RS is designed to provide increased throughput, low process cost, and reliable, repeatable results. With its advanced safety design, environmental protection, and temperature control technology, Integra RS is the perfect RTP solution for applications ranging from MEMS devices to large-area photovoltaics.