Used AXCELIS / FUSION Integra RS #293615015 for sale

AXCELIS / FUSION Integra RS Rapid Thermal Processor from FUSION is an advanced semiconductor process chamber that provides precise, precise thermal processing for various applications and markets. FUSION Integra RS has an advanced design which allows for maximum control of the processing parameters, allowing for unbeatable processing quality and repeatability. AXCELIS Integra RS rapid thermal processor offers two distinct systems, the Standard and Plus, both of which offer efficient thermal management and precise temperature uniformity that reduces alignment-related damage. The Standard and Plus systems allow users to reach peak substrate temperatures of 1450°C and 1550°C, respectively. The latter also offers quicker thermal processing with a maximum ramp rate of 12,000°C/min, making it suitable for high speed and high power applications, while the Standard variety can reach up to 10,000°C/min. Integra RS rapid thermal processor incorporates several key design features which ensure precise, repeatable results. Its vacuum chamber is housed within a thermally stable enclosure, providing temperature uniformity, thermal efficiency and temperature control. Its highly configurable design also enables users to customize the chamber's characteristics to their exact requirements. AXCELIS / FUSION Integra RS utilizes an ultra-precise, linear drive equipment for an automatic wafer movement for precise loading and unloading of wafers. Its state-of-the-art reaction chamber offers users advanced gas control, including precise flow rate and pressure control of the source gases, and a patented control system to manage mass throughput. FUSION Integra RS Rapid Thermal Processor offers a suite of optional feet and accessories, including an oxidizer, purifier, shock absorber and quartz susceptor, allowing users to upgrade their unit as desired. Its advanced safety systems enhance user safety and machine uptime, protecting against potential risks of high temperature processing. In conclusion, AXCELIS Integra RS Rapid Thermal Processor offers unparalleled performance in thermal processing, enabling users to maximize yields and reduce yield losses. This advanced tool provides an unbeatable combination of speed, accuracy, temperature uniformity and control, making it an ideal choice for a range of semiconductor processing needs.