Used TEL / TOKYO ELECTRON Alpha-8S-ZAR #9227411 for sale

TEL / TOKYO ELECTRON Alpha-8S-ZAR is a rapid thermal processor designed for use in the semiconductor fabrication industry. It is an advanced high-temperature rapid thermal annealer (RTA) that provides precise and rapid thermal control of wafers. The equipment features an advanced optical system which utilizes flash lamp illumination for ultra-fast heating, an electromagnetically driven quartz oscillator plank, and two linear feedback actuators for maximum thermal control. TEL Alpha-8S-ZAR uses multiple ultra-fast pulsed flash lamps to produce a rapid and uniform temperature ramp rate, providing precise wafer temperature control during annealing. In addition, the unit features a unique data capture and control capability enabled by its 'FluxEye' function which measures and stores wafer temperature measurements, allowing for better processing control. TOKYO ELECTRON Alpha-8S-ZAR also provides a high processing temperature range of up to 1,400°C in ultra-low pressure environments. This provides increased process and film uniformity, superior thermal control, and a high degree of repeatability over long-term processes. Alpha-8S-ZAR is equipped with a wide range of advanced safety features, including a hydrogen safety option which initiates an emergency evacuation procedure if hydrogen levels reach dangerous levels in the chamber. The machine is also designed with a fully automated OFF-LINE functions, including an inert gas flow calibration tool, independent heater current and voltage readings for further process control, and an automatic temperature compensation algorithm which helps to prevent process overruns and thermal damage to the wafers. In addition, TEL / TOKYO ELECTRON Alpha-8S-ZAR features an advanced FM/AM oscillator with built-in remote control capability. This remote control feature allows users to monitor the asset's parameters from a remote location, ensuring that process control is maintained at all times. TEL Alpha-8S-ZAR is designed to meet the needs of semiconductor fabrication environments, providing users with superior process control and repeatability over long-term annealing processes. Its advanced safety features, wide range of capabilities, and Remote Control features make it an ideal choice for the demanding semiconductor fabrication industries.