Used SEMITHERM / SEMITOOL VTP 1500 LH for sale

Name: SEMITHERM / SEMITOOL VTP 1500 LH
SKU: VTP 1500 LH
Availability: PreOrder

Diffusion Furnaces & Accessories

Manufacturer

SEMITHERM / SEMITOOL

Model

VTP 1500 LH

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LPCVD Reactor furnace Control unit Manual Facility requirements: Furnace: 150 Amps Vacuum pump: 150

834

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LPCVD System.

LPCVD System, 8".

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LPCVD Reactor furnace Process: SiN 1995 vintage.

313