Used TRIKON / ELECTROTECH ND-6210 #9123640 for sale
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ID: 9123640
Wafer Size: 6"
PECVD System, 6"
Process: SiN-SiC (Sio2)
Gases: CF4, O2, N2, N2O, SiH4, NH3, SiH4/Ar-5%, CH4
Manuals included.
TRIKON / ELECTROTECH ND-6210 is a quality sputtering equipment designed for a variety of applications. With all necessary features for quality gold deposition, this system is the ideal choice for research as well as industrial processes. The unit is based on a three-axis computer-controlled motion platform, including two linear slides and one rotary. This creates a maximum working area of 400 x 400 x 70 mm. A total of three arms, each carrying up to four targets for dual or quad configuration, provide unlimited sample-to-target distance. TRIKON ND-6210 achieves the highest precision of gold deposition thanks to its high-performance Turbo Ionization Vacuum (TIV) Sputter source. This state-of-the-art technology boasts very low ionization rates, enabling further reduction of the gold deposition rate for thin film applications. Meanwhile, its high voltage arc ignition provides high deposition rate. The TIV source also enables a short stand-by current, meaning the machine can quickly switch between different gold profiles. ELECTROTECH ND-6210 also provides a large variety of supporting process monitoring tools. Its user-friendly touch LCD panel gives accurate sputtering pressure readings and enables remote pressure control. It also allows direct operation parameters tuning, giving users total control over the deposition process. Additionally, ND-6210 maintains a low outgas temperature and features a 90-degree bendable coupling, ensuring maximum flexibility of the tool. By preventing contamination, it enlarges the lifetime of the components and maintains a clean process chamber. In summary, TRIKON / ELECTROTECH ND-6210 is an advanced sputtering asset, designed for a variety of applications. It offers exceptional precision and control in gold deposition, thanks to its state-of-the-art Turbo Ionization Vacuum Sputter source. Supporting process monitoring tools, a user-friendly touch LCD panel, low outgas temperature and flexible coupling further strengthen its appeal.
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