Used TRIKON / ELECTROTECH ND-6210 #9123644 for sale
URL successfully copied!
Tap to zoom
ID: 9123644
Wafer Size: 6"
Vintage: 1995
PECVD System, 6"
Process: SiN-SiC (Sio2)
Gases: CF4, O2, N2, N2O, SiH4, NH3, SiH4/Ar-5%, CH4
Manuals included
Missing parts:
RF Generator
Chuck
Vacuum sensor
1995 vintage.
TRIKON / ELECTROTECH ND-6210 is a high-performance sputtering equipment designed for detailed multi-layer deposition. This system is well-suited for a variety of applications, such as optoelectronics, hybrid microelectronics, solar cells, gate dielectrics, protective coatings, and many other physical vapor deposition processes. TRIKON ND-6210 features an advanced DC power supply unit with a maximum power rating of up to 25 kV and peak output of 500 W. This makes it suitable for a wide variety of applications, as high voltages allow full control of the depth and uniformity of the deposited layers. ELECTROTECH ND-6210 also includes an independent three-term control machine, which allows control of target current, voltage, and/or power. ND-6210 has a robust mechanical structure to ensure long-term stability during deposition processes. This structure includes a reliable vacuum chamber and high-precision motion stages. The vacuum chamber is a fully-integrated distribution box tool, featuring a large capacity diffusion pump and a two-stage mechanical pump. This allows for a base pressure of up to 5 x 10-9 Torr. The motion stages have a lower-level analysis resolution of 0.1 micron and are operated by a servo drive motor. This allows precise positioning of the substrate and target. TRIKON / ELECTROTECH ND-6210 also features a built-in sputter target of 10 cm in diameter. The target is fabricated from high purity materials such as ceramics and graphite that are ideal for direct deposition. In addition, the sputter target can support non-metallic materials such as oxides, nitrides, and silicides. The RF power supply ensures precise power delivery and control capabilities that allow for a uniform layer thickness. TRIKON ND-6210 is also designed to be user-friendly with its intuitive user interface. The asset includes a touch- screen, digital feedback indicator, and programmable process recipes. The user can also easily control process parameters such as pressure, process time, gas flow rate, and current. This allows users to easily adjust the sputtering process and monitor deposition in real-time. Overall, ELECTROTECH ND-6210 is a robust, high-performance sputtering model ideal for multi-layer deposition in a variety of industries. With its advanced power supply equipment, independent three-term control system, robust mechanical structure, sputter target, and user-friendly interface, ND-6210 is the perfect choice for any precision deposition application.
There are no reviews yet