Used TRIKON / ELECTROTECH PLASMAFAB MS4200 #293655332 for sale

TRIKON / ELECTROTECH PLASMAFAB MS4200 is a multi-purpose sputtering equipment designed for precision thin film deposition. The system is outfitted with an easily adjustable rotatable twin target shield to provide excellent uniformity and thin film homogeneity. The MS4200 also has a highly efficient, variable power supply for accurate control of the power delivered to the sputtering targets. The variable power supply allows for the adjustment of target flux and sheath voltage. It also has a planar monocrystalline target design for increased sputtering rates. The MS4200 also features an Uniform Substrate Heater with a temperature range from 150 oC to 450 oC for sustained conditioning and film dehydration. This feature ensures uniform deposition across a wide range of substrate sizes and thicknesses. The heater also provides high temperature uniformity and stability over a large wafer diameter range. The MS4200 also has a full-featured gas management unit with an adjustable gas flow rate, pressure, and scope. It also has an RF generator and optional process control for additional flexibility. The generator allows for the adjustment of RF pulse width to ensure optimum film uniformity and adhesion. Lastly, the MS4200 is supplied with a vacuum machine to maintain process uniformity and hermetic sealing of the chamber. Overall, TRIKON PLASMAFAB MS4200 is ideal for depositing thin films with superior density, homogeneity, and uniformity. The multi-functional features of the tool provide users with the flexibility and performance necessary to achieve their thin film deposition objectives.