Used TEGAL 6500 for sale

Manufacturer
TEGAL
Model
6500
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TEGAL 6500 #9238618

TEGAL

6500

System, 6" Etch chamber Passivation chamber, 6” for metal etch AlSi / AlSiCu PM1-Non-functional P
137
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TEGAL 6500 #9161990

TEGAL

6500

Dry etcher.
117