Used TEL / TOKYO ELECTRON TELIUS TSP-3055SSS for sale

Name: TEL / TOKYO ELECTRON TELIUS TSP-3055SSS
SKU: TELIUS TSP-3055SSS
Availability: PreOrder

Etchers / Ashers

Manufacturer

TEL / TOKYO ELECTRON

Model

TELIUS TSP-3055SSS

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Dry etcher, 12" Process: SHIN Processing type: Vacuum Wafer type: Notch Process gases: (16) Gases:

115

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Dry etcher Loader module: (3) Load port units (2) Process sections: (2) Process Modules (PM) (2) L