Used TRIKON / ELECTROTECH ND 2 for sale

Manufacturer
TRIKON / ELECTROTECH
Model
ND 2
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TRIKON / ELECTROTECH ND 2 #9195483

TRIKON / ELECTROTECH

ND 2

PECVD System, 6" Process: SiN-SiC (Sio2) Gases: CF4, O2, N2, N2O, SiH4, NH3, SiH4/Ar 5%, CH4 Manuals
116
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