Used BROOKS / PRI AUTOMATION FAB Express #128309 for sale

BROOKS / PRI AUTOMATION FAB Express is a high-end automated wafer handler equipment designed to increase production throughput for photolithographic processes in the semiconductor fabrication industry. BROOKS FAB Express is a multi-axis robotic arm that transports and positions eight-inch wafers with a horizontal and vertical accuracy of 13.7 microns. It has a static position accuracy of ± 7.9 microns and can handle wafers densely packed onto and off of cassette docks. PRI AUTOMATION FAB Express has its own two-axis end effector that has a 17-microsecond settling time when picking up or setting down wafers. The system has an onboard high-speed bus connecting it to a photolithographic stepper, its host computer, and other machine elements. FAB Express is able to store up to 5000 different positions on its bus, and can perform these motions up to 200 times per second. It also has a removable operator control panel, where users can manually enter commands or new wafer coordinates. Additionally, BROOKS / PRI AUTOMATION FAB Express has collision and product recognition capabilities, an integrated vision unit that captures images and feedback on wafers in transit, and a barcode reader to detect and handle each cassette. BROOKS FAB Express has a maximum transport speed of 3.0 m/s and a maximum acceleration of 5.0 G. It also features a modular design, whereby its components may be separated and connected directly to a control machine. This ensures increased efficiency by eliminating the need to reload programs and paths into the control tool and simplifying installation and troubleshooting. PRI AUTOMATION FAB Express is also equipped with safety systems. In addition to being designed to meet OSHA requirements, the asset is also compliant with the European Standards ENORM 14971 and CE/UL safety standards. This ensures that FAB Express is safe for workers and the environment. In sum, BROOKS / PRI AUTOMATION FAB Express is a fully automated wafer handler model specifically designed to increase production throughput and efficiency in the semiconductor photolithographic process. This equipment is reliable, efficient, and versatile. BROOKS FAB Express also meets the highest safety requirements and has flexible features to suit the requirements of any fabrication facility.