Used BROOKS / PRI AUTOMATION FAB Express for sale

Wafer Handlers

Manufacturer

BROOKS / PRI AUTOMATION

Model

FAB Express

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Loadport Part number: 109752-34.

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Wafer loader P/N: 002-7391-08 Robot 978-262-2900.

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Loadport, 12" Accepts up to (3) load ports P/N: 134081 BROOKS Robot modules: Wafer presenter / Hand

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Loadport, 8" P/N 002-7200-06.

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Loadports, 12" P/N 002-7200-20.