Used BROOKS / PRI AUTOMATION FAB Express #9205922 for sale
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ID: 9205922
Wafer Size: 12"
Vintage: 2008
Loadport, 12"
Accepts up to (3) load ports
P/N: 134081
BROOKS Robot modules:
Wafer presenter / Handling robot with (2) 300mm vacuum-holding wafer arms
Series 8 robot controller
Robot track: Y Axis
Inligner wafer aligner
Teaching pendant
2008 vintage.
BROOKS / PRI AUTOMATION FAB Express wafer handler is a highly advanced robotic equipment that is designed to meet the demanding needs of the semiconductor and electronics industry. BROOKS FAB Express is capable of handling a wide variety of wafer sizes, from 2" to 76mm in size, with an accuracy of ±3 microns, and can be used in either a horizontal or a vertical orientation. Its advanced microprocessor control system allows for a fast and accurate wafer transfer between processes, eliminating the need to manually move wafers and ensure precise alignment of each wafer. PRI AUTOMATION FAB Express is equipped with versatile load ports for a variety of industry standard formats, providing the flexibility to accommodate a wide range of wafer configurations. This allows for a fast and versatile operation, minimizing downtime when moving wafers between processes. Furthermore, FAB Express includes a highly advanced vision unit, enabling precise placement and transport of wafers between multiple stations safely. In addition, the wafer handler boasts an intuitive and user-friendly graphical user interface which allows for quick and easy setup, configuration and monitoring of the machine. Its front panel monitors provide real-time information on process status, as well as visual indicators for any potential alarms that may require attention. BROOKS / PRI AUTOMATION FAB Express is also supported by a comprehensive tool library which provides advanced automation features to enhance its capabilities even further. This library includes an integrated recipe management tool, secure multi-lane transfer capabilities, tool monitoring, and more. Overall, BROOKS FAB Express wafer handler is a highly advanced and reliable robotic asset that provides precision control when transferring wafers between multiple processes. Its advanced vision model, intuitive user interface, versatile load ports, and comprehensive tool library, make it an ideal choice for any demanding wafer handling application.
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