Used BROOKS / PRI AUTOMATION FAB Express #9281243 for sale

BROOKS / PRI AUTOMATION FAB Express is an automated wafer handler designed to maximize factory automation and throughput efficiency for high-volume, high-mix semiconductor facilities. This wafer handler automates the transfer and loading of wafers to and from process tools, cassette input systems, load locks, and test handlers, using either cassette-cassette, cassette-tool or cassette-load lock transfers. It features a modular design which enables customized wafer handling systems to be designed and built to meet the application requirements of specific institutions, with chemical compatibility and temperature control options available. BROOKS FAB Express is designed to optimize throughput and minimize changeover time, with its flexible configuration and advanced motion control capabilities. It has the capability to handle a wide range of wafer sizes from micro devices to larger products, and can manage up to 6,400 wafers/hour with a 2,000 wafer capacity. PRI AUTOMATION FAB Express offers a variety of different configurations to suit the needs of different users including cluster, linear, and T-bar configurations. In addition to wafer handling, FAB Express also performs vacuum wafer handling, wafer orientation control, and post-cleaning operations, decreasing reliance on human labor while increasing high levels of process control and throughput. It also features sophisticated user programming tools, such as the Visual Fab software, and a full range of communication options for secure data transfer. The system is easy to maintain and upgrade, with back-up functionality and online diagnostics available. BROOKS / PRI AUTOMATION FAB Express is also designed to minimize downtime for maintenance, making it ideal for high-volume applications. Its durability and reliability supports multiple runs and extended operate durations. Overall, BROOKS FAB Express is an automated wafer handling system designed to increase factory automation and throughput efficiency for high-volume, high-mix semiconductor facilities. It offers flexible configurations and advanced motion control capabilities, as well as a range of user programming tools and communication options for secure data transfer. It is highly reliable, durable, and easy to maintain, with online diagnostics and backup functionality available for maximum uptime.