Used ULVAC COVOT-6-X5A #293642937 for sale

ULVAC COVOT-6-X5A
Manufacturer
ULVAC
Model
COVOT-6-X5A
ID: 293642937
Robot.
ULVAC COVOT-6-X5A is a wafer handler designed for testing and loading of semiconductor wafers. It is a compact equipment that uses a vacuum-based platform and a pair of robotic arms to move the wafers from one station to another. The system incorporates a temperature controller, that ensures temperature stability for testing operations with very low material tolerances. COVOT-6-X5A wafer handler has a 6-inch wafer capacity with a maximum of 2 tools at each station. To ensure precise transfer and handling of the wafers, the unit uses a vacuum-based handling machine that supports a chuck-to-chuck vacuum operation. It also has an efficient vacuum interface that utilizes a virtual plane for correct height orientation. The robotic arm movement is controlled by a PC-based controller incorporating a human-machine interface (HMI). It also provides a recipe program editing software that permits users to optimize test and operation recipes for each wafer. An integrated software tool offers predictive maintenance functions and monitors asset status for data control and traceability. The model's temperature controller uses a Peltier cell to maintain temperatures stable up to 100°C. It supports an integrated temperature setpoint control operation for each individual tool. The integrated temperature controller also has an adaptive PID control for maintaining accuracy of the process. ULVAC COVOT-6-X5A wafer handler has an ergonomic design featuring an open architecture and large access windows. Intuitive switches and visual indicators are included on the equipment as well as access to an on-board troubleshooting menu. It also has digital I/O modules for monitoring overdrive and evacuation phases. COVOT-6-X5A wafer handler is an ideal choice for performing multiple loading, testing and measurements operations in industries like semiconductor, microelectromechanical systems (MEMS) and optoelectronic production processes. Its combination of efficient computer-controlled robotic arms, reliable temperature control and a wide range of safety features makes it a very versatile and reliable system, allowing it to meet the demands of modern production processes.
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