Used ULVAC COVOT-6-X5A #293664110 for sale

ULVAC COVOT-6-X5A is a wafer handler designed to efficiently and reliably provide wafer transport services for both silicon and non-silicon substrates. This wafer handler boasts a modular and flexible architecture that provides superior stand-alone operation or integration into existing factory automation systems. COVOT-6-X5A is capable of handling single wafers up to 200mm in size and has an operating temperature range of 15°C~40°C. The wafer handler features built-in cleanroom environment control to High A/C ROOM (ISO Class 4) with relative humidity control (20~70% RH) and particle numbers to 0.03μm (with ULVAC-ICP3 filteration equipment). The sequence program is PC-based with simple program revision via EMME/3 software. This ensures easy and intuitive product configuration, program creation, maintenance and data logging. ULVAC COVOT-6-X5A handler has a built-in chiller cooling system with four independent cooling zones for substrate cooling. It includes automatic cassette exchange and cassette unloading to FOUP (or other GAPs) with an optional dual-arm handler for more rigid substrates. The wafer transfer unit configurations include dual-arm grabbing for up to 20 wafers together and it can be programmed for two transport axis and the multiple-arm control robot with the multiple rotary-slide motion machine for transport and manipulation of the wafer. The clamping tool features a high-rigidity pneumatic ejector and air blow type back pressurization for reliable and secure substrate handling. COVOT-6-X5A's wiring monitor includes multiple built-in safety devices to prevent errors caused by wiring disconnection. This wafer handler is equipped with PFA covered belts, includes a micro-step motor with dedicated encoder for precise wafer positioning and can be integrated with an existing customer factory automation asset or operated as a stand-alone model. In order to ensure operational reliability, ULVAC COVOT-6-X5A wafer handler employs diagnostic functions for equipment alarm analysis and maintenance log recording, in addition to operation check verification. It is also designed to reduce maintenance operations through the X-ray CT system. This wafer handler is CE compliant and includes a ceiling-mounted console with keyboards, and a pair of large monitors.