Used ULVAC COVOT-6-X5A #293664111 for sale

Manufacturer
ULVAC
Model
COVOT-6-X5A
ID: 293664111
Vintage: 2015
Robot 2015 vintage.
ULVAC Covot model 6-X5A is a versatile wafer handler. It is designed to handle up to six wafers with a maximum size of 8 inch wafer. It features two independent load ports for loading and unloading of multiple sets of wafers, so that both work pieces and carrier plates can be loaded and unloaded quickly and safely. Its low profile design and simple mechanism make ULVAC COVOT-6-X5A a great choice for tight spaces. The wafer handler offers a high speed, repeatable, and accurate handling capability. The wafers can be transported to any desired press points at rates up to 10mm/sec. A vacuum suction system ensures that the wafers do not shift during transport, resulting in superior repeat accuracy. COVOT-6-X5A is equipped with a PMP-X4 and automatic centering foot to ensure accurate positioning of the wafer in toolset. To ensure a secure connection between wafer and transfer mechanism, it is also equipped with a special locking mechanism. This makes ULVAC COVOT-6-X5A an ideal wafer handler for use in tight spaces. COVOT-6-X5A also offers a room temperature blue light alignment system. This system uses two CCD cameras to capture the images to guarantee accuracy and stability. The precision camera provides sub-micron accuracy alignment, which means that the slightest misalignment is quickly detected and corrected. ULVAC COVOT-6-X5A is designed for maximum production uptime and long term durability. It uses advanced electric motors with speed and torque control for smooth and accurate handling of wafer. To protect the motors from overloading, COVOT-6-X5A features a level alarm that warns users when the motor is overloading. Overall, ULVAC COVOT-6-X5A is an ideal choice for wafer handling in tight workspaces. Its low profile and highspeed repeatable operation combined with the advanced features make it the perfect choice for any demanding wafer transfer application.
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