Used ULVAC COVOT-6 #293664113 for sale

ULVAC COVOT-6 is an ultra-low contamination 6-inch wafer handler that provides reliable wafer handling capabilities and an ultra-low contamination environment. This wafer handler is designed to meet the exacting requirements of semiconductor production applications. COVOT-6 is equipped with an extended-length chuck that provides increased vacuum holding force along with improved planarity. Its smooth operation ensures high-performance wafer handing and delivery. The compact design of the handler offers a space-saving solution and its flexible loading station includes adapters for both 6" and 8" wafers as well as a port for alignment ports. The wafer handler also includes several features that offer a high level of contamination control. A special triple seal system helps to reduce contamination levels both inside and outside the process chamber by limiting the entry of particles into the chamber. The usage of stainless-steel components contributes to a further reduction of potential contamination sources. The dimensions of the handler and the air pollution suppression layer allow a faster and easier transfer of wafers in a jigs and fixtures. ULVAC COVOT-6 Wafer Handler also comes with a number of safety features, such as an alarm system for alerting the user of a temperature or vacuum changes, air dampers on the inlet and outlet, and pressure lockout on the exhaust side. In summary, COVOT-6 Wafer Handler is an ultra-low contamination, space saving solution designed to meet the exacting requirements of semiconductor production applications. Its features provide a reliable and secure wafer handling, an ultra-low contamination environment, and several safety features. The compact design and extended-length chuck offer smooth operation while the triple seal system and stainless-steel components aid in mitigating the risk of contamination.