Used ULVAC COVOT-6 #293664115 for sale

ULVAC COVOT-6 is a fully-featured wafer handler designed to deliver high levels of precision and accuracy in the handling of fragile and valuable wafers. The equipment is capable of handling wafers between 4 inches and 6 inches in diameter and includes a low-pressure transfer system for optimized wafer protection. COVOT-6 boasts a repeatability of ±5μm, one of the highest accuracy levels available on the market. The unit features an automated clamping platform that secures and handles wafers securely and the low-pressure transfer machine ensures maximum surface protection for delicate substrates. Single-wafer loading is also available, with a unique position-tool that accurately measures the position of the wafer within the unit. ULVAC COVOT-6's automated wafer washing capability minimizes the risk of contamination and eliminates the need for manual cleaning, increasing overall throughput. The asset also features a built-in detector and safety model, to ensure the exact wafer-load status is monitored and efficiently managed. The wafer handler features an intuitive, user-friendly interface that allows for seamless and simple operation. Configurable settings ensure optimal integration with related components such as robots or process chambers, to achieve a complete automated uniform transfer. The unit can also detect and reject non-standard wafer sizes and materials, and a modular design permits additional modules to be easily added to its capabilities. COVOT-6 also provides precise and consistent temperature control from furnace to chamber, along with an ultra-fast vacuum recovery rate. This level of precision ensures wafers are heated up and cooled evenly, allowing for optimal product quality. In conclusion, ULVAC COVOT-6 is a versatile wafer handling equipment that delivers superior levels of precision and accuracy. Its automated functions and intuitive user interface, along with its range of features such as low-pressure transfer, clamp platform and temperature control, make COVOT-6 an effective and reliable wafer handling solution.