Used ULVAC COVOT-6 #293664118 for sale

Manufacturer
ULVAC
Model
COVOT-6
ID: 293664118
Robot.
ULVAC COVOT-6 is an advanced wafer handler equipment designed for handling semiconductor wafers of all sizes, including 200mm and 300mm wafers. It is highly reliable and operates with numerous process steps all in a single platform, providing efficient transfer and positioning of wafers. COVOT-6 consists of a main unit, two robot arms and a robot hand. The main unit houses a variety of systems including control modules, a power supply unit, a communications board and a mounting tool for attaching the robot arms. The two robot arms, each of which can be moved independently or in tandem, are capable of transferring and positioning wafers up to 200mm size. The robot hand is used to grip and release wafers from/to a jig or tray. The robot arm is equipped with a five-axis punch and a vision system for monitoring and controlling wafer movement. The robot unit is programmed with a number of commands which allow it to execute various operations such as alignment, transfer, and positioning of wafers. It is also capable of varying the speed, force, and acceleration depending on the type of wafer being handled. Furthermore, the machine includes features which protect wafers from environmental contamination by using an environmental control unit. This unit filters and removes foreign particles from the tool before handling. Overall, ULVAC COVOT-6 is an advanced and highly reliable wafer handler which provides efficient wafer transfer and positioning in a single platform. Its superior performance and features make it an ideal solution for a variety of semiconductor processes. Its advanced injury prevention mechanisms protect wafers from mechanical damage and its environmental control guards against contamination. COVOT-6 provides a high level of controlled operation for the handling of any type of wafer.
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