Used ULVAC COVOT-6 #293664119 for sale

ULVAC COVOT-6 is a wafer handling equipment designed for semiconductor wafer processing applications. It is a fully automated, programmable wafer handling system capable of handling wafers up to 6 inches and wafer stacks up to 4 inches in thickness. COVOT-6 uses a combination of reliable robotics and precision controllers that provide smooth and accurate handling of wafers and substrates during transfer from one station to another. The unit is composed of an integrated wafer loader, two wafer handling robots, an air-bearing positioner, and six processing Aligners. The robotic arms feature two independent high-speed, 6-axis robots that supply repeatable accuracy and flexibility in wafer handling. These robots have the capability to precisely position and move the wafers with maximum torque control. ULVAC COVOT-6 provides high accuracy and repeatability of positioning with its air-bearing positioner, which feature precision linear motors for individual control of its three stages. It also contains six on-board microprocessors and software controls which allow each of the Aligners to align wafers for repeatable accuracy and throughput. The wafer handling machine is programmed and controlled through Human Machine Interface (HMI) systems that can be customized for each application. It is also equipped with integrated sensors that monitor the wafer's position and status during transfer, and adjust the robot arm movements accordingly. This maximizes production quality and throughput. Finally, COVOT-6 is equipped with a remote monitoring tool that allows operators to easily access data related to the asset's performance. Thus allowing operators to optimize model operations and processes, while improving the yield of wafer production. ULVAC COVOT-6 is an ideal wafer handling equipment for semiconductor processes as it guarantees superior wafer handling accuracy in a wide array of industrial applications. Its robust robotic technology ensures speed, precision, and repeatability of performance, significantly improving throughput and contribution to overall productivity.