Used ASML Twinscan AT 1100B #293667141 for sale

ASML Twinscan AT 1100B
ID: 293667141
ArF Scanner.
ASML Twinscan AT 1100B is an advanced wafer stepper that is used for photolithography in the semiconductor industry. It is a high-performance lithography tool that provides superior resolution, excellent uniformity, and fast cycle time, enabling high-volume semiconductor manufacturing. The TwinScan's scanning equipment is composed of two top-of-the-line lithography optics (optics 1 and 2) in a two-mirror scanning configuration. This setup offers superior imaging and excellent uniformity across the entire wafer, and is capable of accommodating a wide range of wafer sizes. The TwinScan's advanced optics also provide superior resolution levels, scanning up to 0.35µm feature sizes with its maximum NA equal to 0.9. Other features of Twinscan AT 1100B include its advanced, user-friendly control software, which enables easy operation and system customization. This also minimizes alignment time and provides quick wafer set-up. The unit also provides a self-troubleshooting feature which can quickly identify and resolve any machine errors. The TwinScan is designed to provide superior metrology, which is essential for photolithography processes. It is equipped with an active metrology tool, which utilizes a monochromatic interference shield to detect 3D topography errors. It features a wafer overlap multi-field stitching mode, which is useful for precise stitching of multi-field images. ASML Twinscan AT 1100B also features a high-vacuum asset and a precise wafer loading model, allowing for high performance and high throughput. In addition, its advanced resist cook-off equipment prevents burning of the resist during exposure, resulting in improved performance. Overall, Twinscan AT 1100B is a top-of-the-line wafer stepper that provides unbeatable resolution, uniformity, and cycle time. Its advanced features and high-precision metrology make it an ideal choice for production environments that require utmost accuracy and high-volume production.
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