Used CANON FPA 5510 iX #293636290 for sale
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ID: 293636290
Wafer Size: 12"
Vintage: 2014
Stepper, 12"
Reticle size: 6"
Overlay accuracy: ≤ 50 nm
Resolution: ≤ 500 nm
Numerical aperture (NA): 0.28 - 0.37
Exposure area: 52 mm x 56 mm
2014 vintage.
CANON FPA 5510 iX is a wafer stepper designed to manufacture semiconductors. The machine is designed for high-volume production and offers a precise, highly integrated solution for photolithography. CANON FPA-5510IX is equipped with a highly efficient light source and advanced optics that accurately transfer images to semiconductor wafers, which is an important part of the manufacturing process. It features an optimized optical equipment, which reduces misalignment and ensures precise imaging. The system incorporates an advanced autofocus feature which can detect small variations in the wafer surface and accurately adjust the focus accordingly. The unit is powered by software that can adjust the parameters of the imaging process based on the type and size of the wafer being used, enabling faster and more accurate imaging. The user-friendly interface allows for easy operation and monitoring of the stepper's performance. The machine is equipped with a digital zoom feature, which is ideal for reducing defects in the microbackgrounds of large scale integrated semiconductor designs. It also supports variable line spacing, which is important for higher resolution designs. Additionally, the stepper can be programmed to scan an area multiple times, increasing resolution and reducing defect rates. FPA 5510 iX is designed with a high-efficiency heat sink and an intelligent cooling machine, preventing overheating and reducing power consumption. It is also capable of operating at high speed, allowing for maximum throughput. FPA-5510IX has been designed for maximum reliability and high-volume production, thanks to its advanced optics, autofocus tool, and software features. The stepper is an efficient solution for semiconductor photolithography and provides quick and reliable imaging results.
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