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Marketplace
Wafer Steppers
CANON
FPA 5510 iX
Used CANON FPA 5510 iX for sale
Wafer Steppers
Manufacturer
CANON
Model
FPA 5510 iX
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Wafer Size
12"
(1)
Vintage
2014
(1)
With photos
(1)
Popular Product
CANON
FPA 5510 iX
Stepper, 12" Reticle size: 6" Overlay accuracy: ≤ 50 nm Resolution: ≤ 500 nm Numerical aperture (NA)
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