Used CANON FPA 5510 iX for sale

Name: CANON FPA 5510 iX
SKU: FPA 5510 iX
Availability: PreOrder

Wafer Steppers

Manufacturer

CANON

Model

FPA 5510 iX

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Stepper, 8"-12" 2014 vintage.

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Stepper.

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Stepper, 12" Reticle size: 6" Overlay accuracy: ≤ 50 nm Resolution: ≤ 500 nm Numerical aperture (NA)

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Stepper Numerical Aperture (NA): 0.37-0.28 DCO:  ≤50 Resolution: ≤500 nm.

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