Used ADE / KLA / TENCOR 3910 #149419 for sale

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ADE / KLA / TENCOR 3910
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ID: 149419
Wafer Size: 8"
Dimensional gauging system, 8" Controller unit Wafer loader.
ADE / KLA / TENCOR 3910 is a wafer testing and metrology equipment designed for use in semiconductor metrology labs. This system enables the characterization and reliability testing of various semiconductor devices, enabling companies to meet their product qualification and production requirements. ADE 3910 unit is comprised of the 39100 Analyzer, the 39130 Automated Measurement Machine (AMS) and the 39165 Automated Solder Measurement Tool (ASMS). The 39100 Analyzer has a 7-axis positioning asset and a high-resolution CCD camera. This combination allows for non-contact, non-destructive measurements of the wafer surface, including critical dimensions (CDs), visual inspection, thin-film analysis and die-level measurements. The 39130 AMS was designed to handle the analysis of multi-axis, multi-pattern metrology data, enabling the testing and measurement of both the top and bottom surfaces of a wafer simultaneously. This model can handle both large and small structures and features a high-resolution spot size scanning camera and two parallel scanners for sample positioning, enabling high-quality surface scans of features down to 5-micrometer resolution. The 39165 ASMS is specifically designed to test and measure the integrity of solder joints and bond pads on semiconductor wafers. It automatically acquires images of the solder bumps and can measure their height and width with a high accuracy of 0.5 micrometer. Further, the equipment is designed to detect voids, balls, nodules, and other defects found on solder joints. In addition to the quality assurance systems, KLA 3910 offers a wide range of wafer-level metrology tools, including soft defect and root-cause analysis, phase slip defect detection, velocity of defect inspection, and wide area and line-width uniformity measurements. 3910 system also features a calibration utility which can fine-tune metrology measurements and automated analyses of die-level topography data. Overall, TENCOR 3910 is an all-in-one unit which combines the capabilities of multiple sophisticated metrology systems. It enables the complete analysis of semiconductor wafers, ensuring semicon product performance and reliability. With its flexibility and accuracy, ADE / KLA / TENCOR 3910 provides engineers with a complete and reliable characterization solution.
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