Used ADE / KLA / TENCOR 5810 #9170075 for sale

ID: 9170075
Non contact capacitance gauging module (2) ADE 2248 Probes.
ADE / KLA / TENCOR 5810 Wafer Testing and Metrology equipment is a versatile and efficient tool designed to meet an array of application needs in the semiconductor manufacturing industry. It features a high-throughput rate with a broad range of wafer testing capabilities, enabling rapid and accurate wafer testing processes. The system features an innovative and advanced, full-cassette Advanced Scatterometry Metrology technology, which is designed to measure the angular distribution of scattered light from the surface of a wafer. This feature provides an analysis of a wide range of film thicknesses, as well as providing an accurate, simultaneous measurement of both photomask and waveguide patterns on a single wafer. In addition, this feature reduces complexity and cost, as multiple measurements can be taken concurrently. The unit is built upon a highly automated platform, with a built-in, high-resolution TEM imaging microscope included. This enables a wide variety of image analysis operations to be performed, from EBSD (electron backscatter diffraction) to capacitance measurements and etch processing. For example, the TEM imaging microscope can be used to measure droplet size, line density and pattern orientation, which is extremely useful for the defect inspection of semiconductor chips. Moreover, the machine is also capable of performing advanced wafer testing procedures, such as defect isolation and 3-D surface characterization. This type of capability is indispensable for understanding the overall performance of the wafer as well as isolating process-related defects. Finally, ADE 5810 Wafer Testing and Metrology tool is designed to be user-friendly and enable higher throughput rates, while still delivering high levels of accuracy and precision. With a wide range of features and capabilities, the asset is an ideal choice for those interested in rapidly and accurately testing wafers for a variety of purposes.
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