Used ADE / KLA / TENCOR 603 #9397720 for sale

ADE / KLA / TENCOR 603 is an advanced wafer testing and metrology equipment designed to meet the demands of the most demanding process control applications. The system provides high-speed, high-accuracy surface analysis measurements of devices at different levels in the production process. The unit is able to detect defects as small as 5nm, ensuring highly precise metrology and excellent yield performance. ADE 603 is equipped with a fast scan incubator (FSI) and automated defect review (ADR) software, providing precise measurements and greater accuracy than traditional wafer inspection systems. The FSI enables the machine to rapidly measure device surface features, allowing for fast data acquisition and analysis. The ADR software ensures precise automation of defect detection, helping to achieve improved yield performance and yields. KLA 603 tool is supported by a variety of tool options, including an automated measurement archive (AMA), a multi-dimensional touch probe asset, and a laser interferometry-based inspection tool. The AMA is a unique feature of the model, allowing for automatically archiving dimensions, feature profiles, and pattern recognition reports, supporting the highest accuracy. The extended touch-probe equipment, capable of measuring up to 4-axis and 10 points on device surfaces, provides precise measurements of individual structures, as well as full profile measurements. Finally, the laser-interferometry-based inspection tool enables non-contact inspection of both surfaces and passivation layers. 603 is an ideal choice for high-end process control applications, enabling exact measurements and comprehensive analysis of device size and shape. The system's powerful combination of high-speed, high-accuracy surface analysis measurements, easy-to-use tool options, and advanced architecture allows for maximum yield and cost-efficiency.