Used ADE / KLA / TENCOR 6033T #196422 for sale
Wafer Size: Up to 6"
Wafer thickness measurement system, up to 6" Specifications: Non-contact All electronic gaging Measures thickness and total thickness variation (TTV).
ADE / KLA / TENCOR 6033T is a wafer testing and metrology equipment designed for the spectral-domain infrared photoluminescence (PL) and laser scatter-field (SF) metrology of advanced semiconductor devices at 1063 nm. The system is equipped with a 60x magnified optical microscope, two laser sources with adjustable center wavelengths, and an optical unit that covers the spectral range of 200-1700 nm. The optical microscope is used to inspect the wafer and to align and focus the lasers. The optical machine enables both static and dynamic PL measurement modes, allowing users to take detailed measurements of the wafer's performance. ADE 6033T also offers a real-time particle count, which offers an insight into any contamination on the wafer. KLA 6033T is integrated with a software suite that provides a graphical user interface for intuitive testing and data analysis, as well as the software algorithms for automated analysis, device matching, and error correction. The software also supports the remote monitoring and management of multiple 6033T systems from a single access point. TENCOR 6033T offers a wide range of features designed to make wafer metrology easier and more accurate. The tool uses highly sensitive detection algorithms to detect even small differences between devices on the wafer. It can also identify defects, detect abnormal devices, and measure transistors and other internal nodes with sub-micrometer accuracy. The asset includes an air-cooled, 765 nm laser coupled with an ultra-stable 532 nm laser that is capable of delivering an average power of up to 60mW across the spectral range for the PL measurement. The advanced lasers also provide higher accuracy for capturing fine detail and for wafer-level testing over a broad wavelength range. Overall, ADE / KLA / TENCOR 6033T is an incredibly reliable and accurate wafer testing and metrology model that is designed to meet the demanding needs of the semiconductor industry. It offers the ultimate in precision, speed, and flexibility, allowing users to quickly and accurately measure the performance of their devices.
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