Used ADE / KLA / TENCOR 6035 #293654293 for sale

ADE / KLA / TENCOR 6035
ID: 293654293
Wafer resistivity gauges.
ADE / KLA / TENCOR 6035 is a world-leading wafer testing and metrology equipment developed by ADE Corp. This system utilizes advanced non-contact white light interferometry (WLI) to allow for the inspection, measurement and characterization of semiconductor wafers. The WLI technology works by collecting an interference pattern from the wafer and calculating the surface topography from this pattern. This is done by an object beam of light which uses a low-distortion image-based displacement sensor for high spatial accuracy. The object beam is then overlaid onto a reference beam which scans the sample according to z-piezometer servo-controlled XY stages, providing rapid and reliable lateral scans across the sample. ADE 6035 is capable of capturing up to sixteen different parameters at once, allowing for a variety of defects and metrology measurements such as particle and surface topography, flatness, step heights, bowed and bowed repeats. These measurements can be made in both dark-field and bright-field regimes using a specialized optical filter. The unit also includes a contourbased surface analysis program, allowing users to compare results of multiple surfaces at the same time. This feature enables users to visualize patterns and trends in the surface data, helping to identify correlations between samples. Furthermore, the machine has a re-measurement feature, which allows for careful and reliable measurements of specific features over time. Finally, KLA 6035 is capable of providing customers with their own customized layouts for sample management, with features such as job cloning and quick loading of specific tests. This is especially useful for those who regularly inspect multiple wafers at the same time. In summary, 6035 wafer testing and metrology tool provides an advanced, non-contact WLI solution which offers a range of benefits such as multi-parameter measurements, contour surface analysis, and customizable sample management. This asset is ideal for those in the semiconductor industry who need to inspect and measure multiple wafers at the same time.
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