Used ADE / KLA / TENCOR 9500 UltraGage #133688 for sale
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ID: 133688
Wafer dimensional measurement system
Includes:
Main body / head unit
Cassette loader
UPS
Test sample
Missing computer.
ADE / KLA / TENCOR 9500 UltraGage is an advanced wafer testing and metrology equipment designed for high accuracy and reliability across a wide range of wafer geometries and applications. This advanced system features a 4" XYZ stage that has been designed specifically for measuring and controlling the shape, size and form of the device under test. Its advanced capabilities include two-dimensional (2D) measurements, three-dimensional (3D) measurements, backside measurements as well as alignment and placement measurements. The unit has automated sensitivity adjustment and wafer calibration to provide highly accurate results with no user intervention required. With a 32-bit Real-Time 64-bit Digital Signal Processor (DSP) and programmable controller, ADE 9500 UltraGage can generate signal processing and data logging operations in minutes. Additionally, the machine can be used for wafer tracing and mapping, die-to-die evaluation, recipe modules and contouring, enabling it to meet a wide range of metrology needs. KLA 9500 UltraGage utilizes an imaging tool which is capable of capturing wafer details down to 1.5 microns in size. This coupled with its advanced signal processing algorithms allows it to accurately identify and map out features as small as 3.5 Nanometers. Other features include pattern recognition, cross correction and auto-thresholding. For increased data accuracy, the asset is equipped with waveform processing algorithms to eliminate environmental, noise, drift and shadowing effects. This feature is known as "Signature" and is used for on the spot testing of wafers allowing a realtime comparison between wafers. Signature mode aids the user in measuring focus, tilt and repeatability of the device being tested. 9500 UltraGage also has the ability to store up to 500 recipes and up to 25,000 frames of video, enabling the user to generate highly detailed reports with all the relevant data required. It also features pattern recognition and advanced feature detection, offering an intuitive user experience. To ensure accuracy and reliability, TENCOR 9500 UltraGage has been designed with an advanced vibration and temperature compensation model for improved wafer testing and metrology results. It has an integrated image storage facility, allowing users to access images, analysis and reports quickly and efficiently. With its 4" maximum wafer size, it can perform testing and metrology tasks on small and large wafers alike quickly and easily. ADE / KLA / TENCOR 9500 UltraGage is a powerful and advanced wafer testing and metrology equipment, capable of delivering superior and precise results across a broad spectrum of wafer geometries and applications. Built with advanced processors and sophisticated algorithms, ADE 9500 UltraGage provides fast and reliable testing, allowing users to stay competitive with efficient and precise metrology results.
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