Used ADE / KLA / TENCOR 9500 UltraGage #9249958 for sale

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ID: 9249958
Wafer Size: 8"
Measurement system, 8".
ADE / KLA / TENCOR 9500 UltraGage is a wafer testing and metrology equipment that provides a reliable and fast method of testing for etch, deposition, and contact-hole alignment on bonded wafers. This system is designed to facilitate process metrology applications in manufacturing settings, allowing users to easily monitor and measure the quality of their product, and ensuring product integrity and performance. The unit utilizes a unique laser-optical feedback mechanism to measure micron-level geometric changes that occur during the manufacturing process. The optics measure three parameters, including the surface height, the lateral position, and the angular orientation. This allows the machine to accurately measure wafer topography with the aid of various optical probes and sensors. The tool employs a linear stage to move the wafer into position and provide the necessary measurements. The laser-optical feedback mechanism also allows for the measurement of etch depth, deposition thickness, and contact-hole alignment. ADE 9500 UltraGage also offers a robust asset for user control. The touch-screen convenience panel utilises an intuitive graphical user interface to ensure easy operation. This allows users to quickly set or modify parameters, initiate measurements, and view the results. Process data can also be logged and used to monitor trends and compare accuracy over time. The model's innovative optical design ensures flexible and precise table scanning. The optics are housed in a motorized base to ensure that the wafer is scanned in a continuous motion from edge to edge. This ensures the highest level of accuracy and repeatability, even for tight tolerances. KLA 9500 UltraGage is a powerful wafer testing and metrology equipment that provides reliable and fast analysis of process metrology applications. With its advanced laser-optical feedback mechanism and intuitive graphical user interface, users can accurately test and measure their product to ensure product integrity and performance.
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