Used ADE / KLA / TENCOR 9500 #9281188 for sale

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ADE / KLA / TENCOR 9500
Sold
ID: 9281188
Wafer Size: 4"-8"
Measurement system, 4"-8" ASC 2000 Controller.
ADE / KLA / TENCOR 9500 is a wafer testing and metrology system designed to meet the needs of thin film device engineers for advanced semiconductor applications. It provides a comprehensive set of metrology capabilities, allowing users to accurately measure a wide range of process layers. Its unique combination of optical microscopy, laser interferometry, scatterometry, and other techniques make it well suited for both pre-characterization and post-yield troubleshooting of semiconductor processes. The device is capable of accurately measuring optical, electrical, and structural properties of thin film layers on a wafer. It includes capabilities for mapping, imaging, and analyzing surface topography (with sub-Angstrom resolution) and electrical characteristics of a sample. Additionally, the system can perform a variety of functions such as critical dimension (CD) measurement, patterned imaging, and in-line defect review. ADE 9500 also offers automatic rapid alignment of the sample and multiple automated features such as laser focus optimization, particle search, die search, field review, and region-of-interest zoom. It is designed to help ensure a consistent and reliable measurement performance through routine calibration. The system includes a variety of modular tools that are tailored towards specific process steps and various user needs. Accurate data readings are generated quickly and accurately. Users have access to powerful, yet intuitive, software that allows them to store images, analyze results, and generate reports for sharing. Finally, KLA 9500 has intuitive, graphical user (GUI) driven workflow tools, helping users complete tasks more quickly and simply. Additional features such as high-speed data transfer and automated data transmission ensure a seamless working environment. This along with its industry-leading metrology technology make it an excellent choice for any advanced semiconductor application.
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