Used ADE / KLA / TENCOR 9520 UltraGage #9164709 for sale

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ADE / KLA / TENCOR 9520 UltraGage
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ID: 9164709
Wafer measurement system.
ADE / KLA / TENCOR 9520 UltraGage is a wafer testing and metrology equipment developed to provide precise, high quality measurements for the semiconductor industry. It is designed to provide fast, accurate results for a variety of wafer testing and metrology applications such as die and feature size, film thickness, coatings and wafer map metrology. It is also capable of automatic measurement and analysis of wafer characteristics to obtain statistical information and yield information. The system features an ultra-precise measurement unit, with an X-Y stage capable of automatically mapping profiles over a large area of the wafer. The stage features linear motors, 2-axis positioning accuracy of less than one micron, and repeatability of less than twenty-five nanometers. The machine is also equipped with a high resolution CCD camera to allow detailed visualization of wafer geometries and surface features. The tool also utilizes a wide field of view to ensure accurate readings from different angles, improving measurement precision. For performance testing, a laser interferometer is used to provide an unprecedented accuracy to test results. It features high speed measurement capabilities, adaptive clocking and jittering feedback to deliver accurate results. The asset also includes an integrated microprocessor and a data acquisition model, allowing for programming of measurement criteria and data acquisition. The equipment offers an easy-to-use interface, allowing users to quickly and easily set up and store user-specific parameters. Finally, the system includes an integrated thermal chamber that allows for temperature testing of sample wafers. It also features a programmable modular controller that is capable of controlling up to four thermal modules for simultaneous testing. This feature eliminates the need for manual temperature control, ensuring precise and accurate testing results. With its cutting edge technology and precise measurement capabilities, ADE 9520 UltraGage is a powerful wafer testing and metrology tool for the semiconductor industry. It is designed to provide accurate and reliable test results quickly and easily, allowing for rapid and accurate production of high-quality products.
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