Used ADE / KLA / TENCOR 9520 UltraGage #9245050 for sale

Name: ADE / KLA / TENCOR 9520 UltraGage
Brand: ADE / KLA / TENCOR
SKU: 9245050
Availability: InStock

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Photo Used ADE / KLA / TENCOR 9520 UltraGage For Sale

Wafer Testing And Metrology

Manufacturer

ADE / KLA / TENCOR

Model

9520 UltraGage

ID: 9245050

Dimensional measurement system ASC200 Controller included Thickness: ± 1.00µ Shape (Bow / Warp): ±( 3.00 + 5% of reading) µm ±( 4.00 + 5% of reading) µm Global flatness: ± 0.50 µm Integral wafer centering and pre-aligner Backside contacting chuck Vacuum chuck diameters: Small (23.3 mm): 3", 100 mm -150 mm wafers Large (33.4 mm): 125 mm- 200 mm wafers Wafer contact materials: Resting pads: Santoprene Vacuum chuck: Polyurethane Nominal wafer thickness range: 250 µm - 750 µm Auto-loader: Single / Dual cassette Sorting: Slot-to-slot / Cassette-to-cassette Backside contact, horizontal cassette orientation Wafer contact material: Teflon Nominal wafer thickness range: 250 µm - 750 µm Conductivity type: P / N Edge exclusion: Thickness: 3 mm / 5 mm Shape: 3 mm Nominal wafer thickness: 250 µm - 750 µm Resistivity: > 0.1-200 Ω cm Edge gradient: 0.1 µm/mm Power supply: Temperature range: 12.7°- 29.4° C (55° - 85° F) Relative humidity: 55 to 95% non-condensing Vacuum: 0.6 SCFM, 635 mm (25") Hg ± 10% Peak usage: 2.8 kVA Voltage: 100/120/200/208/220/230/240 VAC ± 10% 50/60 Hz, Single phase.

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ADE / KLA / TENCOR 9520 UltraGage is an advanced wafer testing and metrology equipment designed and manufactured by ADE. ADE 9520 UltraGage uses innovative technologies combined with advanced hardware and software capabilities to provide the highest level of accuracy, precision, and performance. The system is designed to help its users measure a range of critical features and parameters on wafer and substrates used in the semiconductor and microelectronic industries. KLA 9520 UltraGage is based upon a high-speed optical metrology platform featuring top-of-the-line optics and image processing. This allows users to measure a wide range of wafer features with unprecedented resolution and accuracy. The unit is specifically designed for the inspection of semiconductor substrates measuring up to 12 inches in diameter. It has an advanced XY stage that supports up to 12-inch wafers, making it a powerful tool for measuring minute features across different substrates. The machine is equipped with a variety of features that enable it to perform measurements of critical parameters effectively. This includes an advanced wafer mapping tool that can detect trace defects, flaws, and contamination on a sample wafer. It also has powerful algorithms that allow for accurate analysis of measured values and statistical detection of non-uniformity across various substrates. In addition, 9520 UltraGage has built-in software that allows users to customize the parameters for wafer quality control and metrology applications, enabling them to obtain more reliable results. The asset is also equipped with a built-in calibration model to guarantee accurate and repeatable measurements, while a powerful optical microscope helps to quickly identify any surface defects. TENCOR 9520 UltraGage is an ideal tool for quality control and characterization during wafer processing. Thanks to its powerful features, and its exceptional accuracy and precision, the equipment can provide invaluable insights into wafer fabrication and inspection. By offering improved performance and reliability, ADE / KLA / TENCOR 9520 UltraGage helps companies reduce their costs and ensure quality at the same time.