Used ADE / KLA / TENCOR 9600 #9095972 for sale
Wafer inspection systems (2) Inputs (3) Outputs Hi-res station ASC 2000 Signal arm robot E++ stage Does not include probe arm.
ADE / KLA / TENCOR 9600 equipment is a wafer testing and metrology system which uses advanced imaging capabilities and wafer-level metrology to accurately measure, analyze, and characterize wafers and their components. Using high-resolution scanning and imaging technology, the unit can provide results with high precision and accuracy. For the testing portion of the machine, a patented optical scanning technology called Defect Inspection and Sizing (DIS) scans the entire wafer surface in search of defects. These defects can be automatically measured, classified, and analyzed using an image recognition algorithm. By using separate color channels and both wide-angle and narrow-angle optics, the tool is able to accurately identify and size a variety of defects such as residue, particles, and cracks. The metrology portion of the asset is able to provide the accurate dimensions of a wafer's structure. A high-resolution optics model is combined with a fast wafer-level auto-alignment equipment to provide detailed measurements with a submicron accuracy. The system can measure a wide range of parameters such as step height, thickness, and contact area. Additionally, the unit is also able to capture high-resolution images of the surface for topographical analysis. ADE 9600 machine has a user-friendly interface that allows for easy set-up and control of parameters. It is designed to help users quickly identify and correct defects on the wafer surface, which can result in higher yields and an improved manufacturing process. With its automated pass/fail inspection capabilities and automated data analysis, the tool can provide detailed wafer testing and metrology results in a fraction of the time it would take with manual methods.
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