Used ADE / KLA / TENCOR 9800 UltraScan #9046074 for sale
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ID: 9046074
Wafer characterization system, 8"
ULTRASCAN 9800 Flat top standard base system:
Wafer Size 6" and 8"
High Accuracy Noncontact Prealigner
E-Squared Advanced/Thickness, B/W Station
May accommodate up to 5 cassettes
Auto A Probe included
Advanced System Controller 2000 and Accessories: UPS (uninterruptible power supply)
System Software and Operating System: SCO 5.0 UNIX System
Included:
Part No. 9300-DEET
Robot Dual End Effector Teflon Coated - 135°
Part No. 7800-150-ASC2K
Standard ASC Software for ASC2000
Part No. 7800-180
15" ViewSonic Flat Panel Monitor
(2) Part No. 9300-36ND
Send "Universal" cassette station
(3) Part No. 9300-37ND
Receive "Universal" cassette station
Part No. 7800-6HZ
System configured for 60 HZ
Part No. 7820-220
Line Conditioner and Transformer, 4.8 kVA
Input Voltage: 220 V 50/60 HZ
Input: 9 Foot Linecord with L14-30P Plug
Output: (1) L14-30R Receptacle
Part No. 025106-01
Topside Non-contact type
N or P type wafers
Resistivity 0.1 to 200 ohm-cm
Part No. 444001 ReportTools
Part No. 9300-57EMI
High Range EMI, High-Accuracy
Resistivity Station
(0.200 - 199.9 ohm/cm)
Robot error when attempting to run calibration
Currently installed
2004 vintage.
ADE / KLA / TENCOR 9800 UltraScan is a desktop wafer inspection and metrology equipment that performs a variety of tests to assess the quality and features of semiconductor wafers. The system offers high-precision analytics and metrology capabilities to determine the structural characteristics of wafers. A variety of tests can be conducted, including scanning for contaminants and defects, characterizing shapes and sizes, measuring electrical properties, and analyzing statistical process control data to reduce yield variability and manufacturing times. ADE 9800 UltraScan has a variety of features that enable it to quickly and accurately inspect semiconductor wafers. It is equipped with an automated wafer handling unit to ensure rapid sample exchange capabilities. It also features advanced imaging and optics to view the wafer's surface in high detail. In addition, the machine is optimized to support a range of applications with a variety of analysis techniques, including scanning electron microscopy and confocal microscopy imaging. The machine is also equipped with a variety of functionalities to facilitate wafer inspection. It has analytics capabilities to identify contaminants and defects on wafers and validate surface finish quality. It also has detailed inspection and metrology capabilities to measure critical charges of wafer shapes and sizes, such as pitch, edge profile, and radius. Additionally, KLA 9800 UltraScan has a powerful statistical process control (SPC) suite to generate SPC charts and control charts to monitor production yields and identify manufacturing irregularities. The machine also has advanced networking capabilities for remote machine control and data sharing. It has Ethernet ports to connect controllers to a local or wide-area network, as well as application programming interfaces to integrate with other systems. This enables 9800 UltraScan to be deployed in factory automation and data management systems. Overall, TENCOR 9800 UltraScan is a powerful, high-precision wafer testing and metrology machine. It offers a variety of features, including advanced imaging and optics, automated wafer handling, analytics capabilities, detailed inspection and metrology capabilities, and a powerful SPC suite. Additionally, it has advanced networking capabilities for remote control and data sharing. This makes it an ideal choice for assessing semiconductor wafers and monitoring production yields.
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