Used ADE / KLA / TENCOR AFS 3220 #293645322 for sale

ID: 293645322
Wafer inspection system 2006 vintage.
ADE / KLA / TENCOR AFS 3220 is a wafer testing and metrology equipment designed to provide reliable and accurate measurements of multiple parameters related to the electrical, optical and mechanical characteristics and performance of semiconductor wafers. This system is capable of measuring up to 32 wafers at a time, allowing for high throughput rates for wafer testing and analysis. The unit runs on Windows 10 and features a 21-inch display for easy setup and operation. A choice of software packages is available to extend the range of measurements that the machine can handle, enabling it to cover a wider array of applications. It includes an integrated microscope and three measurement heads, providing full access to the surface of the wafers. ADE AFS 3220 is equipped with a high-resolution imaging tool, allowing for accurate measurement of parameters such as surface topology and contamination levels, linewidths, critical dimensions, and overlay fidelity. Its automated pattern recognition enables the asset to detect patterns, allowing for easy auto-calibration and confirmatory measurements. It is also capable of measuring close-tolerance device structures and other more complex designs. The model can measure to an accuracy better than 10nm, making it suitable even for submicron-scale process technologies. KLA AFS 3220 incorporates multiple technologies and technologies from ADE, KLA, and TENCOR. It is based on a metrology architecture with a wafer chuck, an precise XY stage, and an industry-leading control equipment. The features a high-power laser confocal analysis system for precise imaging, as well as precise and reliable eddy-current sensors for electrical measurements. It is equipped with a high-resolution RGB imaging unit and vibration-isolated optics to further enhance measurement accuracy. AFS 3220 is designed to work with a wide range of substrates and applications. Its modular and scalable design allows it to be integrated into various production environments, delivering reliable and accurate measurements regardless of the size of the production lot. It is also equipped with standard safety features to protect the operators and the machine, making it suitable for 24/7 wafer testing and inspection operations.
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