Used ADE / KLA / TENCOR AFS 3220 #293660055 for sale

ADE / KLA / TENCOR AFS 3220
ID: 293660055
Wafer Size: 12"
Vintage: 2005
Wafer inspection system, 12" 2005 vintage.
ADE / KLA / TENCOR AFS 3220 is a high-end wafer testing and metrology equipment used for metrology and wafer inspection. This system consists of a multi-channel laser shearing interferometer and 3D laser surface profiler. It has 64 laser channels and is used for measurement and imaging of the surface topography on both wafers and die. ADE AFS 3220 also offers an array of software applications to provide surface data analysis and wafer inspection. KLA AFS 3220's laser shearing interferometer is designed to measure the surface height of a sample by using two lasers and a splitting beam. This allows for a highly accurate measurement over a wide range of surfaces. The 3D laser surface profiler uses a high resolution scanning unit to provide detailed views of the sample surface. It can inspect the topography with sub-nanometer precision in an area of up to 200mm. AFS 3220 also has several software applications for data analysis and wafer inspection. These include WaferMap™, which is a software package for automated analysis of wafer topography and defect detection. Another tool, Deformetrica™, is designed to measure and analyze the surface height of a sample in three dimensions. In addition, it can detect and analyze patterns on the sample surface which are indicative of wafer defects. TENCOR AFS 3220 is a powerful wafer testing and metrology machine that is used for highly accurate measurements of wafers and die surfaces. With its laser shearing interferometer and 3D laser surface profiler, ADE / KLA / TENCOR AFS 3220 provides detailed views of surface topography, allowing for quick detection and characterization of wafer defects. In addition, its suite of software provides automated analysis of sample surface height and pattern measurement capability. All together, ADE AFS 3220 provides a complete solution for wafer testing and metrology.
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