Used ADE / KLA / TENCOR AFS 3220 #293757418 for sale

ADE / KLA / TENCOR AFS 3220 is a wafer testing and metrology equipment that provides high resolution of 2D and 3D data for application-specific measurements on front- and backside surfaces of wafers. The system is designed to detect against surface defects on semiconductor wafers, as well as measure various profile and critical dimension parameters. This unit enables patterned measurement with independent X- and Y-axis stage motion and utilizes a high-speed, high-resolution imaging machine that combines auto focus, pattern recognition, and defect detection engineering to generate 2D images and 3D surface images with up to 5µm resolution in the X- and Y-axis. The tool also features a 10-inch mirror and motorized z-axis stage lift asset to capture data, as well as a 5-position integrated illumination model that is completely programmable with UV, Visible, and IR lights sources, enabling accurate analysis of reflectivity and surface features. The highly automated equipment also features advanced defect review and classification tools that enable defect analysis, sorting, and identification. In addition, the system includes ADE Process Monitor (KPM), which provides real-time data analysis and performance monitoring. The KPM enables the determination of the causes of defects and enables timely corrective action and improved yields. Finally, ADE AFS 3220 offers an integrated environment for defect detection, review, and classification as well as measurement of parameters on patterned 2D and 3D surface profiles. The unit runs on a Windows 10 platform and allows easy customization of the defect review and measurement parameters to fit specific needs. With a wide range of options, KLA AFS 3220 is an effective and reliable wafer testing machine for evaluation and comparison of high- and low-volume parts.